| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carrier device miniaturized in a substrate insertion/extraction direction at travelling while preventing a substrate from projecting. <P>SOLUTION: The carrier device comprises: a traveling supporter 10 capable of traveling while holding a storage container 4; and a projection prevention mechanism 9 preventing a substrate 5 from projecting from an opening 6 of the storage container 4. The projection prevention mechanism 9 is constituted by a contact body 26 movable between a contact position contacting to the side face of the substrate 5 and a remote position apart from the side face of the substrate 5. The contact position of the contact body 26 is set in such a manner that the contact body 26 is positioned between a end portion of the substrate on the opening side and the central portion thereof. <P>COPYRIGHT: (C)2012,JPO&INPIT |
