| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-voltage pulse generation device which can apply a high-voltage short pulse to a load with high efficiency, and a discharge excitation gas laser device including the high-voltage pulse generation device. <P>SOLUTION: A high-voltage pulse generation device comprises a pulse generation circuit 24 for generation a high-voltage pulse, and a pulse compression circuit 25 for compressing the generated high-voltage pulse. In the high-voltage pulse generation device, at least a part of components included in the pulse generation circuit 24 and the pulse compression circuit 25 is disposed in a container filled with insulation coolant, and the component disposed in the container and the component disposed outside the container are electrically connected to each other via a current inlet terminal 44. The current inlet terminal 44 includes current-carrying members 57 and 58 on a high-voltage side and a ground side, respectively, and at least one of the current-carrying members 57 and 58 on the high-voltage side and the ground side has a planar shape. <P>COPYRIGHT: (C)2012,JPO&INPIT |
