NANOSHEET TRANSDUCER

摘要

PROBLEM TO BE SOLVED: To reduce the manufacturing cost of a transducer.

SOLUTION: The nanosheet transducer (1) includes: a substrate (100) formed of silicon in which a groove (100a), an electrode support (101) and a sheet-like flexible electrode (104) with a thickness smaller than 1 μm are formed where the electrode support and the flexible electrode are separated from each other by the groove; a fixed electrode (103) formed of a conductive film formed on the electrode support; and an insulation layer (102) formed between the fixed electrode and the electrode support where the flexible electrode is formed perpendicular to the principal surface of the substrate.

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