CONDUCTIVE OXIDE LAYER CRYSTAL-ORIENTED ON AMORPHOUS BASE MATERIAL AND FORMATION METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a base body having a conductive oxide layer of LaNiO3, La2NiO4or SrRuO3or the like which is crystalline with excellent orientation on an amorphous base material.

SOLUTION: In the method of forming a crystalline La-Ni-O-based material layer on the amorphous base material, a first layer of an La-Ni-O-based material is formed at a first temperature on the amorphous base material, then a second layer of the La-Ni-O-based material is formed on the first layer of the La-Ni-O-based material under a second temperature condition higher than the first temperature, wherein the crystal orientation of the second layer of the La-Ni-O-based material is higher than that of the first layer of the La-Ni-O-based material. The conductive oxide layer of SrRuO3or the like can be provided on the La-Ni-O-based material.

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