| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cassette cover entirely covering a second cassette when the second cassette which can house a second wafer of a diameter of 200 mm is set to a load port for a first cassette which can house a first wafer of a diameter of 300 mm using a cassette adapter. <P>SOLUTION: Three faces, i.e., a front face, a back face and a bottom face are opened, and an adapter body and a second cassette K<SB POS="POST">2</SB>can be entirely covered. The adapter body is integrally mounted to an adapter base V so that it is inclined toward a front side through a front opening. Blocking flange parts 46 are integrally provided at a front end of a cassette cover C toward both of right and left directions, so that the front peripheral end of the cassette cover C can closely contact or approach to a peripheral edge of a wafer transfer window 1a of a load port body 1, while the second cassette K<SB POS="POST">2</SB>covered by the cassette cover C reaches a carrying-in and carrying-out position of the second wafer, which is a forward end position by a forward movement of a carrier base 5 of a load port P. <P>COPYRIGHT: (C)2012,JPO&INPIT |
