发明名称 FILM THICKNESS MEASURING APPARATUS AND FILM THICKNESS MEASUREMENT METHOD
摘要 <P>PROBLEM TO BE SOLVED: To evaluate reliability regarding the maximum value of photography data which is used when film thickness of a translucent film is calculated to perform film thickness measurement with high reliability. <P>SOLUTION: This film thickness measuring apparatus includes: a focus degree calculation part 6a which positions a photographing part 2 with focal distance of fixed length to various kinds of height to calculate a focus degree of a photographed image when a substrate including a base material and a translucent film is photographed; a maximum value detection part 6b which detects the maximum value of a focus degree curve consisting of the focus degree to a position of the photographing part 2; a reliability calculation determination part 6c which calculates reliability of the maximum value to determine whether or not the maximum value is a proper value; a boundary position calculation part 6d which calculates the position of the photographing part 2 corresponding to the maximum value determined as proper by the reliability calculation determination part 6c as a boundary position; and a film thickness calculation part 6e which calculates film thickness of the translucent film based on the boundary position. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012063308(A) 申请公布日期 2012.03.29
申请号 JP20100209340 申请日期 2010.09.17
申请人 NEC CORP 发明人 UENO YOSHINORI;NAGAO MASAHIKO
分类号 G01B11/06;H01L21/027 主分类号 G01B11/06
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