发明名称 RASPBERRY-TYPE METAL OXIDE NANOSTRUCTURES COATED WITH CEO2 NANOPARTICLES FOR CHEMICAL MECHANICAL PLANARIZATION (CMP)
摘要 Raspberry-type coated particles comprising a core selected from the group consisting of metal oxides of Si, Ti, Zr, Al, Zn and mixtures thereof with a core size of from 20 to 100 nm wherein the core is coated with CeCO2 particles having a particle size below 10 nm; process for preparing raspberry type coated particles comprising the steps of i) providing a mixture containing: a) core particles selected from the group of metal oxides of Si, Ti, Zr, Al, Zn and mixtures thereof, with a particle size of from 20 to 100 nm; b) a water soluble Ce-salt and c) water; ii) adding an organic or inorganic base to the mixture of step i) at temperatures of from 10 to 90° C. and iii) aging the mixture at temperatures of from 10 to 90° C.; and polishing agents containing the particles and their use for polishing surfaces.
申请公布号 US2012077419(A1) 申请公布日期 2012.03.29
申请号 US201013376270 申请日期 2010.05.27
申请人 BASF SE 发明人 ZHANG ZHIHUA;DALVI VAIBHAV;MEHTA BIR DARBAR;FECHTENKOETTER ANDREAS;LI YUZHUO;LAUTER MICHAEL
分类号 C09K3/14;B24B1/00;B82Y30/00;B82Y40/00;C09G1/02;C09K13/00 主分类号 C09K3/14
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