METHOD FOR MANUFACTURING ORGANIC EL ELEMENT, FILM FORMING APPARATUS, AND ORGANIC EL ELEMENT

摘要

Provided is a technique for improving the sealing performance of a protective film of an organic EL element. A first protective film (6), which is formed of an inorganic material that contains Si in the chemical structure, is formed by a PECVD method or a sputtering method so as to be in close contact with a second electrode layer (5) of an object to be processed (1) wherein a first electrode layer (3), an organic layer (4) and the second electrode layer (5) are sequentially laminated on a substrate (2), and then a second protective film (7), which is formed of Al2O3, is formed by an ALD method so as to be in close contact with the first protective film (6). The object to be processed (1) is not exposed to the outside air from the time when the formation of the first protective film (6) in close contact with the second electrode layer (5) is started until the time when the formation of the second protective film (7) in close contact with the first protective film (6) is completed.