| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide technology which is effective for simplifying a microlens array or solid state image pickup device manufacturing process and/or preventing misalignment between microlenses. <P>SOLUTION: A microlens array or solid state image pickup device manufacturing method comprises a process of forming a resist film on a structure which includes a plurality of light receiving units, a process of exposing the resist film to light using a photomask which has a plurality of lens patterns necessary to form a plurality of microlenses disposed therein, a process of developing the light-exposed resist film to form a resist pattern, and a process of forming the plurality of microlenses by heat treating the resist pattern. The plurality of lens patterns include lens patterns differing in a light transmittance distribution of exposure light from each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
