FORMATION METHOD OF ELECTROMECHANICAL CONVERSION FILM, ELECTROMECHANICAL CONVERSION FILM, ELECTROMECHANICAL CONVERSION ELEMENT, LIQUID DISCHARGE HEAD AND IMAGE FORMING APPARATUS INCLUDING LIQUID DISCHARGE HEAD

摘要

PROBLEM TO BE SOLVED: To provide an electromechanical conversion film formation method for hardly causing a crack of an electromechanical conversion film.

SOLUTION: The formation method of the electromechanical conversion film for forming the electromechanical conversion film comprises: a process of partially executing surface modification on a substrate 1 to be a first electrode 42; a process of partially applying sol-gel liquid 5 onto the electrode by an ink jet system; a process of drying, thermally decomposing and crystallizing the partially applied sol-gel liquid; and a process of providing a desired film thickness 8 by repeating the process of drying, thermally decomposing and crystallizing the partially applied sol-gel liquid. In the applying process, the sol-gel liquid is dropped so that adjacent dots formed at the landing of sol-gel droplets 6 are arranged at such an interval that they are not clumped together by leveling within a desired pattern area.

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