TOOL FOR MACHINING FINE HOLE, METHOD OF PRODUCING THE SAME, AND METHOD OF PROCESSING POLYMER FILM

摘要

PROBLEM TO BE SOLVED: To provide a tool for machining a fine hole for achieving high efficiency/high-quality fine hole machining, a method of producing the same, and a method of processing a polymer film.

SOLUTION: There is provided a machining tool for a fine hole for forming a fine through-hole formed by a dry etching technique on a single-crystal silicon substrate, and laminating one or more kinds of metal films on at least the inner wall of the fine through-hole to form a metallic hollow-like needle; and this method of machining, on a polymer film, a fine through-hole having the minimum dimension of several micrometers to several tens of micrometers at high accuracy, high quality and high efficiency by using the tool for machining a fine hole.

COPYRIGHT: (C)2012,JPO&INPIT