| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface unevenness inspection apparatus for efficiently detecting surface unevenness of an object to be inspected. <P>SOLUTION: The surface unevenness inspection apparatus includes a line sensor 2, an illumination device 1 for generating contrast patterns with a plurality of phases in parallel with the line sensor 1 and an arithmetic unit 5 for combining linear imaging data imaged by the line sensor 2 with a frame image and is configured so that contrast patterns with a plurality of phases having different irradiation angles are applied to the same imaging target line. The line sensor 2 acquires light from the contrast patterns with the plurality of phases having different irradiation angles reflected by the same imaging target line as a plurality of linear imaging data synchronously with the switching of the contrast patterns. The arithmetic unit 5 generates a plurality of screen images of each phase by combining the imaging data of the same phase out of the plurality of phases when combining the linear imaging data acquired by the line sensor 2 with a frame image, and applies the same image processing to a plurality of generated screen images. <P>COPYRIGHT: (C)2012,JPO&INPIT |
