TOUCHSCREEN PANEL INPUT DEVICE MANUFACTURING METHOD, PIEZOELECTRIC ELEMENT AND TOUCHSCREEN PANEL INPUT DEVICE

摘要

A touchscreen panel input device is manufactured by forming a first adhesion layer and a second adhesion layer on a growth substrate, removing only the second adhesion layer from a selected region by irradiating laser, forming a growth base layer on the selected region where the second adhesion layer is removed and on the second adhesion layer and an oxide thin film having piezoelectricity on the growth base layer, transferring the oxide thin film layer on the selected region to a second substrate having first transparent electrodes by peeling-off, and adhering the second substrate to a third substrate having second transparent electrodes by placing the transferred oxide thin film layer between them. The touchscreen panel input device detects a pushing pressure in addition to a touch position with proving a tactile feedback.