发明名称 |
Low Thermal Mass Semiconductor Wafer Boat |
摘要 |
A wafer boat for a semiconductor wafer includes vertical rods, fingers supported by the vertical rods, and plates supported by the fingers. The plate has a support surface for supporting the wafer and a recessed surface spaced from the support surface and spaced from the wafer. A plurality of holes extends from the recessed surface, and the support surface is free of holes to inhibit contamination of the wafer. |
申请公布号 |
US2012077138(A1) |
申请公布日期 |
2012.03.29 |
申请号 |
US201113232684 |
申请日期 |
2011.09.14 |
申请人 |
GILMORE BRIAN LAWRENCE;HELLWIG LANCE G.;MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
GILMORE BRIAN LAWRENCE;HELLWIG LANCE G. |
分类号 |
H01L21/673 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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