| 发明名称 |
CHEMICAL VAPOR DEPOSITED SILICON CARBIDE ARTICLES |
| 摘要 |
<p>Chemical vapor deposited silicon carbide articles and the methods of making them are disclosed. The chemical vapor deposited silicon carbide articles are composed of multiple parts which are joined together by sintered ceramic joints. The joints strengthen and maintain tolerances at the joints of the articles. The articles may be used in semi-conductor processing.</p> |
| 申请公布号 |
IL217795(D0) |
申请公布日期 |
2012.03.29 |
| 申请号 |
IL20080217795 |
申请日期 |
2008.03.06 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS, LLC;ACG ELECTRONIC MATERIALS OF |
发明人 |
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| 分类号 |
C01B |
主分类号 |
C01B |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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