发明名称 PHYSICAL STATE MEASUREMENT DEVICE AND PHYSICAL STATE MEASUREMENT METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a physical state measurement device and a physical state measurement method for measuring the physical state of a measurement object at a higher speed than a conventional manner. <P>SOLUTION: This physical state measurement device includes: a light source; transmission means for transmitting the rays of light from the light source to the measurement point of the measurement object; a non-linear optical element for converting the wavelength of the rays of light reflected at the measurement point into different wavelength; light reception means for receiving the rays of light whose wavelength has been converted; and measurement means for measuring the physical state of the measurement object at the measurement point based on the waveform of the rays of light received by the light reception means. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012063150(A) 申请公布日期 2012.03.29
申请号 JP20100205402 申请日期 2010.09.14
申请人 TOKYO ELECTRON LTD 发明人 YAMAWAKI JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI
分类号 G01K5/52;H01L21/66 主分类号 G01K5/52
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