APPARATUS FOR DEPOSITING MONOMER AND METHOD FOR EXHAUSTING MONOMER OF THE SAME

摘要

PURPOSE: An apparatus for depositing a monomer and an exhausting method thereof are provided to reduce the replacement costs of a vacuum pump by mounting a monomer recovery unit between a monomer chamber and a vacuum pump. CONSTITUTION: A monomer is deposited on a substrate in a main chamber. The monomer is accepted to a monomer chamber(120) in vapor. A monomer recovery unit recovers the monomer from a gas exhausted to the outside from the monomer chamber. A first vacuum pump(151) is connected to the main chamber or the monomer recovery unit. The first vacuum pump inhales the monomer or the gas within the main chamber or the monomer chamber. A first valve opens or blocks a flow path between the first vacuum pump and the main chamber. A second valve(162) opens or blocks the flow path between the first vacuum pump and the monomer recovery unit.