发明名称 Diamond semiconductor element and process for producing the same
摘要 A process for producing a diamond thin-film comprises a first process-step of forming a diamond crystal thin-film on a substrate, a second process-step of putting two of said diamond crystal thin-film thus formed in readiness, and a third process-step of firing said two diamond crystal thin-films, superimposed each other such that surfaces of the two diamond crystal thin-films make at least partial contact with each other, under a high pressure under which a diamond is stable.
申请公布号 EP2400531(A3) 申请公布日期 2012.03.28
申请号 EP20110182460 申请日期 2006.06.20
申请人 NIPPON TELEGRAPH AND TELEPHONE CORPORATION 发明人 KASU, MAKOTO;MAKIMOTO, TOSHIKI;UEDA, KENJI;YAMAUCHI, YOSHIHARU
分类号 H01L21/338;C23C16/27;C30B25/10;C30B29/04;C30B31/22;C30B33/02;H01L21/04;H01L21/331;H01L21/336;H01L29/04;H01L29/45;H01L29/73;H01L29/732;H01L29/786;H01L29/812;H01L33/00 主分类号 H01L21/338
代理机构 代理人
主权项
地址