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发明名称
CVD REACTOR HAVING A PROCESS CHAMBER LID WHICH CAN BE LOWERED
摘要
申请公布号
EP2010693(B1)
申请公布日期
2012.03.28
申请号
EP20070728168
申请日期
2007.04.17
申请人
AIXTRON SE
发明人
DAUELSBERG, MARTIN;KAEPPELER, JOHANNES;SCHULTE, BERND
分类号
C23C16/44;C23C16/455;C23C16/46
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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