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发明名称
摘要
申请公布号	JP4903307(B2)	申请公布日期	2012.03.28
申请号	JP20000583095	申请日期	1999.11.12
申请人		发明人
分类号	C23C14/06;H01L35/14;H01L29/06;H01L35/22;H01L35/26;H01L35/32;H01L35/34;H02N11/00	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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