发明名称 |
COMPOSITION FOR FORMING INSULATING FILM, METHOD FOR PRODUCING SAME, SILICA INSULATING FILM AND METHOD FOR FORMING SAME |
摘要 |
<p>An insulating-film-forming composition of the invention includes: a hydrolysis-condensation product obtained by hydrolyzing and condensing a hydrolyzable-group-containing silane monomer (A) in the presence of a polycarbosilane (B) and a basic catalyst (C); and an organic solvent.</p> |
申请公布号 |
EP1705208(A4) |
申请公布日期 |
2012.03.28 |
申请号 |
EP20050703613 |
申请日期 |
2005.01.14 |
申请人 |
JSR CORPORATION |
发明人 |
NAKAGAWA, HISASHI;AKIYAMA, MASAHIRO;KUROSAWA, TAKAHIKO;SHIOTA, ATSUSHI |
分类号 |
C09D183/14;B05D5/12;B05D7/24;C08G77/42;C08G77/48;C08G77/50;C08G77/60;C08L83/14;C09D5/25;C09D7/12;C09D183/02;C09D183/04;C09D183/08;H01B3/30;H01B3/46;H01L21/312 |
主分类号 |
C09D183/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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