| 摘要 |
PROBLEM TO BE SOLVED: To appropriately adjust the attitude of an aspherical mirror without spending a long adjustment time. SOLUTION: The curved mirror 13 is attached to a holding member 21 so that it can rotate by taking a first axis Xa as an axis parallel to an X axis in an XY plane, orthogonal to a Z axis as a base axis (mirror axis), as a rotational center, and the curved mirror 13 is held by the holding member 21 so that the attitude in terms of the rotating angle with the first axis Xa as the rotational center can be optionally changed by a first attitude adjustment means. COPYRIGHT: (C)2008,JPO&INPIT |
