| 摘要 |
A method and apparatus for correction of detected radiation data from a semiconductor device are described. The method comprising the steps of measuring a pulse energy reading from radiation incident at the semiconductor device; filtering the signal and determining the time that the filtered signal exceeds a predetermined threshold energy; if the determined time is within predetermined parameter(s) comprising at least a predetermined maximum, storing the pulse energy reading in a first, pulse energy data register; if the determined time is above a predetermined maximum, discarding the pulse energy reading and incrementing a count in a second, discard data register; repeating the above steps to acquire a dataset of pulse energy readings of a desired size in the first data register; and on completion of such acquisition; using the discard data register to supplement the dataset of pulse energy readings by numerically correcting discarded counts and adding back into the dataset of pulse energy readings. |
