| 摘要 |
A coordinates measuring head unit (10) is provided, which is compact, inexpensive, and capable of performing high-precision measurements at high speeds, and facilitates, for example, measurements conducted on machine tools (50) or in-situ measurements on transport lines (60). The head unit (10) includes: drive means (an X-axis drive section 14, a Y-axis drive section 16, and a Z-axis drive section 18), an integrated housing (13) for accommodating the drive means (14, 16, 18), and fixture means (fixture surface 20). The drive means allows a probe (12) to be moved by computer numerical control along a plurality of drive axis, which are orthogonal to each other, and abut against a measuring target (8) to measure the dimensions of the measuring target (8). The fixture means (20) is provided on one of side surfaces of the housing (13) to attach one of the drive means to a support (a support 34 on a stand 32 secured to a base 30). |
