发明名称 |
System, method and apparatus for maintaining separation of liquids in a controlled meniscus |
摘要 |
A system and method of forming and using a proximity head. The proximity head includes a head surface including a first zone, a second zone and an inner return zone. The first zone including a first flat surface region and multiple first discrete holes connected to a corresponding first conduit and arranged in a first row. The second zone including a second flat region and multiple second discrete holes connected to a corresponding second conduit. The inner return zone being disposed between and adjacent to the first zone and the second zone and including multiple inner return discrete hole connected to a corresponding inner return conduit and arranged in an inner return row. The first row and the inner return row are parallel. A portion of an edge of each of the inner return discrete holes is recessed into the head surface. |
申请公布号 |
US8141566(B2) |
申请公布日期 |
2012.03.27 |
申请号 |
US20070820590 |
申请日期 |
2007.06.19 |
申请人 |
O'DONNELL ROBERT;LIN CHENG-YU (SEAN);KHOLODENKO ARNOLD;LAM RESEARCH CORPORATION |
发明人 |
O'DONNELL ROBERT;LIN CHENG-YU (SEAN);KHOLODENKO ARNOLD |
分类号 |
B08B3/04 |
主分类号 |
B08B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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