发明名称 System, method and apparatus for maintaining separation of liquids in a controlled meniscus
摘要 A system and method of forming and using a proximity head. The proximity head includes a head surface including a first zone, a second zone and an inner return zone. The first zone including a first flat surface region and multiple first discrete holes connected to a corresponding first conduit and arranged in a first row. The second zone including a second flat region and multiple second discrete holes connected to a corresponding second conduit. The inner return zone being disposed between and adjacent to the first zone and the second zone and including multiple inner return discrete hole connected to a corresponding inner return conduit and arranged in an inner return row. The first row and the inner return row are parallel. A portion of an edge of each of the inner return discrete holes is recessed into the head surface.
申请公布号 US8141566(B2) 申请公布日期 2012.03.27
申请号 US20070820590 申请日期 2007.06.19
申请人 O'DONNELL ROBERT;LIN CHENG-YU (SEAN);KHOLODENKO ARNOLD;LAM RESEARCH CORPORATION 发明人 O'DONNELL ROBERT;LIN CHENG-YU (SEAN);KHOLODENKO ARNOLD
分类号 B08B3/04 主分类号 B08B3/04
代理机构 代理人
主权项
地址