PREPARATORY PHOTORESIST DISCHARGING DEVICE FOR SUBSTRATE COATER APPARATUS AND SUBSTRATE COATING METHOD USING SAME

摘要

PURPOSE: A pre dispensing device of a substrate coater apparatus and a substrate coating method thereof are provided to prevent the local stress applied on a thin plate from affecting negative effect on the life time of the thin plate. CONSTITUTION: A moving unit moves a thin plate in an air floating type to locate the thin plate between a first position and a second position. The first position is a position in which the thin plate is near to or contacted with a processed substrate(G). The second position is a position out of the first position. The location in which in which the thin plate is near to the processed substrate is a position in which the thin plate is overlapped with a part of the processed substrate. The thin plate is overlapped with a part of the processed substrate in a contacted state.