Load sensor having load detection element and support element and method for manufacturing the same

摘要

A method for manufacturing a load sensor including a load detection element and a support element is provided. The support element includes a base and a spring. The spring includes a support portion, a connection portion bonding to the base, and a connecting member coupling the support portion and the connection portion. The support element transmits a detection load to the load detection element via the base and the spring. The method includes: sandwiching the load detection element between the base and the support portion; bonding the connection portion on the base so that the connecting member is deformed beyond the elastic deformation region to reach the plastic deformation region; pressing the support portion so that a contact surface of the support portion is plastically deformed; and returning deformation of the connecting member to be in the elastic deformation region.