GATE VALVE OF VACUUM CHAMBER DEVICE

摘要

PURPOSE: A gate valve of a vacuum chamber is provided to prevent processing fault due to foreign materials since the pressure of two vacuum chambers is independently controlled and the clean state of the vacuum chamber is maintained at a high level. CONSTITUTION: A gate valve(20) of a vacuum chamber comprises a valve housing(22), a plurality of gate rollers(26), and a finishing plate. For two vacuum chambers to be connected, the valve housing blocks the vacuum chambers from the outside. The gate rollers are transferred on an inclined rail(25) by a driving unit in opposite directions. The gate rollers make contact around samples between the two vacuum chambers. The axial outer circumferential surface of the gate rollers makes close contact with the inner circumferential surface of the valve housing or the sidewall of the vacuum chamber.