发明名称 Microchip and method of manufacturing microchip
摘要 A microchip formed by joining a first substrate having at least one recess on its surface and a second substrate, wherein small projections of 0.5 to 30μm in height are formed on at least a part of the surface having the recess of the first substrate, and a coating formed of a surface processing agent is provided on at least a part of the surface having the small projections formed thereon, as well as a method of manufacturing the microchip, are provided. A microchip allowing easy inspection of the state of application or state of adhesion of liquid material such as a surface processing agent, and allowing accurate optical measurement without causing disturbance such as fluorescence, can be provided.
申请公布号 US8143077(B2) 申请公布日期 2012.03.27
申请号 US20080129869 申请日期 2008.05.30
申请人 MOMOSE SHUN;ROHM CO., LTD. 发明人 MOMOSE SHUN
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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