| 摘要 |
A coplanar waveguide includes a signal line formed on a major surface of a high-resistivity silicon substrate, a pair of ground conductors placed on opposite sides of the signal line, and a pair of trenches formed in the substrate between the signal line and the ground conductors. Because of the trenches, the attenuation characteristics of the coplanar waveguide are highly uniform, and are comparable to the attenuation characteristics of coplanar waveguides formed on compound semiconductor substrates. |
