| 摘要 |
PURPOSE: A nitrogen gas supply device for a semiconductor facility is provided to prevent byproducts from being attached by extensively installing a leading end of a supply pipe in a central axis of a body unit. CONSTITUTION: A body unit(20) is formed in an exhaust line of a vacuum pump and passes exhaust gas through a hollow. A cross axis(24) is formed in an inner wall of the body unit. A leading end of a supply pipe(30) is installed on the upper side of the cross axis and supplies nitrogen gas to the lower side of the cross axis.
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