发明名称 Gated diode with non-planar source region
摘要 A gated-diode semiconductor device or similar component and a method of fabricating the device. The device features a gate structure disposed on a substrate over a channel and adjacent a source and a drain. The top of the source or drain region, or both, are formed so as to be at a higher elevation, in whole or in part, than the bottom of the gate structure. This configuration may be achieved by overlaying the gate structure and substrate with a profile layer that guides a subsequent etch process to create a sloped profile. The source and drain, if both are present, may be symmetrical or asymmetrical. This configuration significantly reduces dopant encroachment and, as a consequence, reduces junction leakage.
申请公布号 US8143680(B2) 申请公布日期 2012.03.27
申请号 US20100778912 申请日期 2010.05.12
申请人 LIN DA-WEN;LIN YING-SHIOU;WANG SHYH-WEI;HUANG LI-PING;LEUNG YING-KEUNG;DIAZ CARLOS H.;TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 LIN DA-WEN;LIN YING-SHIOU;WANG SHYH-WEI;HUANG LI-PING;LEUNG YING-KEUNG;DIAZ CARLOS H.
分类号 H01L29/66;H01L21/336;H01L29/76 主分类号 H01L29/66
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