APPARATUS FOR THIN LAYER DEPOSITION, METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD

摘要

PURPOSE: A thin film deposition apparatus, an OLED(Organic Light Emitting Diode) display manufacturing method using the apparatus, and an OLED display manufactured by the method are provided to continuously deposit a material on a substrate with a scanning method by moving the substrate relative to a thin film deposition apparatus. CONSTITUTION: A thin film deposition apparatus(100) comprises an evaporation source(110) which emits a deposited material(115), an evaporation source nozzle unit(120) including a plurality of evaporation source nozzles(121) formed in a first direction, a patterning slit sheet(150) which is arranged opposite to the evaporation source nozzle unit and includes a plurality of patterning slits(151) formed in the first direction, a first blocking plate assembly which is arranged in the first direction between the evaporation source nozzle unit and the patterning slit sheet and includes first blocking plates(131) which divide the space between the evaporation source nozzle unit and the patterning slit sheet into a plurality of deposition spaces(S), and a second blocking plate(170) whose internal space is divided into a plurality of spaces with a plurality of partitions.