| 发明名称 |
A PROBE DEVICE FOR STUDY OF ELECTRO-PHYSICAL CHARACTERISTICS OF SEMICONDUCTOR STRUCTURES |
| 摘要 |
A probe device for measurement of electro-physical characteristics of semiconductor structures includes spring-loaded probes for supply of test signals. Additional probes are included, those are placed to the guide openings of fluoroplastic plate arranged by template in places corresponding to applied contacts on the test sample. |
| 申请公布号 |
UA68570(U) |
申请公布日期 |
2012.03.26 |
| 申请号 |
UA20110012260U |
申请日期 |
2011.10.19 |
| 申请人 |
IVAN FRANKO LVIV NATIONAL UNIVERSITY |
发明人 |
PAVLYK BOHDAN VASYLIOVYCH;DIDYK ROMAN IVANOVYCH;SHYKORIAK YOSYP ANDRIIOVYCH;LYS ROMAN MYROSLAVOVYCH;HRYPA ANDRII SERHIIOVYCH;SLOBODZIAN DMYTRO PETROVYCH;TSVETKOVA OLHA VALENTYNIVNA |
| 分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
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