| 摘要 |
PURPOSE: An electrostatic chuck which uses an aluminum oxide film is provided to secure stability of an electrode in a high temperature condition by forming the electrode with an anodizing film. CONSTITUTION: An electrostatic chuck has an aluminum electrode and an aluminum-anodizing surface. An anodizing film which is manufactured by oxidation forms an electrode which receives DC power and an electrode which receives process power. A shower head uniformly induces a flow of process gas which used in dry type plasma equipment to plasma space. The process gas flows into a region which generates plasma by passing through a hole formed on the shower head.
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