SPIN CHUCK FOR MANUFACTURING SUBSTRATE

摘要

PURPOSE: A spin chuck for manufacturing a substrate is provided to minimize an amount of process solutions used in a substrate manufacturing process by discharging the process solutions through each process solution discharge unit of a plurality of discharge pipes. CONSTITUTION: A substrate support unit(110) supports a substrate. A plurality of support pins support the lower side or lateral side of the substrate. A substrate rotating driving unit generates a driving force for rotating the substrate support unit. A spin cup(130) prevent process solutions sprayed to the substrate from being distributed to the outside. A spin cup driving unit(150) is connected to the side of the spin cup to move up and down the spin cup.