| 摘要 |
<p>PURPOSE: A substrate separation and transfer apparatus and a method thereof are provided to arrange a substrate track and parts of a belt conveyer within a liquid, thereby preventing drying of substrates before completely separating the substrate. CONSTITUTION: A vertical type belt conveyor(9) comprises two or more transfer belts(11,11"). The vertical type belt conveyor comprises a transfer span(10) located on the front surface(12) of a stack(5). The vertical type belt conveyor comprises a vacuum device which absorbs a forefront substrate(3) of the stack. The two transfer belts of the belt conveyer are closely arranged on the same plane. Two transfer legs(23,24) are included in the transfer belt.</p> |
