SUSCEPTER GROUNDING UNIT, METHOD FOR ALTERING A GROUND OF A SUSCEPTER USING THE SAME AND PROCESS CHAMBER HAVING THE SAME,申请号KR20090118131-传众专利搜索

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发明名称	SUSCEPTER GROUNDING UNIT, METHOD FOR ALTERING A GROUND OF A SUSCEPTER USING THE SAME AND PROCESS CHAMBER HAVING THE SAME
摘要
申请公布号	KR101127757(B1)	申请公布日期	2012.03.23
申请号	KR20090118131	申请日期	2009.12.02
申请人		发明人
分类号	H01L21/205;H01L21/02;H01L21/683	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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