摘要 |
<p>The device has a signal evaluation unit (2), and an interferometer with a light source (3) and detectors (4a,4d). The light source is formed such that it generates light with a coherence length smaller than one centimeter. The device has a focus controller (2d) and a device controlled by the focus controller for changing an optical path length (11). The focus controller is formed, so that it controls the device for changing the optical path length, such that the optical path lengths are matched by measuring and reference beam.</p> |