发明名称 DISPOSITIF POUR LA MESURE OPTIQUE D'UN OBJET.
摘要 <p>The device has a signal evaluation unit (2), and an interferometer with a light source (3) and detectors (4a,4d). The light source is formed such that it generates light with a coherence length smaller than one centimeter. The device has a focus controller (2d) and a device controlled by the focus controller for changing an optical path length (11). The focus controller is formed, so that it controls the device for changing the optical path length, such that the optical path lengths are matched by measuring and reference beam.</p>
申请公布号 FR2913265(B1) 申请公布日期 2012.03.23
申请号 FR20080051351 申请日期 2008.02.29
申请人 POLYTEC GMBH 发明人 REMBE CHRISTIAN DR;DRABENSTEDT ALEXANDER DR;SIEGMUND GEORG DR
分类号 G01B9/02;G01B11/24 主分类号 G01B9/02
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