发明名称 |
METHOD FOR PRODUCING PHOTOVOLTAIC DEVICES |
摘要 |
The purpose of the present invention is to provide a method for producing photovoltaic devices having high conversion efficiency, which minimize the occurrence of surface plasmon absorption in a rear electrode layer. A method for producing a photovoltaic device (100), in which a first transparent electrode layer (2), a photovoltaic layer (3), a second transparent electrode layer (5), and a rear electrode layer (4) comprising a metal film are sequentially laminated on a substrate (1), said method forming the second transparent electrode layer (5) by means of sputtering in a film forming chamber in which the vapor partial pressure is maintained at not more than 0.6%. |
申请公布号 |
WO2012036074(A1) |
申请公布日期 |
2012.03.22 |
申请号 |
WO2011JP70548 |
申请日期 |
2011.09.09 |
申请人 |
MITSUBISHI HEAVY INDUSTRIES, LTD.;WATANABE, TOSHIYA;SAKAI, SATOSHI;ASAHARA, YUJI |
发明人 |
WATANABE, TOSHIYA;SAKAI, SATOSHI;ASAHARA, YUJI |
分类号 |
H01L31/04 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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