发明名称 METHOD FOR PRODUCING AN OPTOELECTRONIC SEMICONDUCTOR COMPONENT
摘要 A method for producing an optoelectronic semiconductor component includes providing a first wafer having a patterned surface, wherein the patterned surface is formed at least in places by elevations having first and second heights, wherein the first height is greater than the second height; providing a second wafer; applying a photoresist to outer areas of the second wafer; patterning a surface of the photoresist facing away from the second wafer by impressing the patterned surface of the first wafer into the photoresist, wherein the elevations are impressed as trenches having a first and second depth into the photoresist; applying a patterning method to the patterned surface of the photoresist, wherein the structure applied on the photoresist is transferred at least in places to the outer area of the second wafer.
申请公布号 US2012070927(A1) 申请公布日期 2012.03.22
申请号 US201013322662 申请日期 2010.05.03
申请人 BAUR ELMAR;HEINDL ALEXANDER;BOEHM BERND;RODE PATRICK;ZULL HERIBERT;OSRAM OPTO SEMICONDUCTORS GMBH 发明人 BAUR ELMAR;HEINDL ALEXANDER;BOEHM BERND;RODE PATRICK;ZULL HERIBERT
分类号 H01L33/48 主分类号 H01L33/48
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