| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate carrying robot solving the problem in which, when a carrying robot carries out a plate-shaped substrate such as a liquid crystal substrate stored in a cassette, a substrate detecting sensor attached to the robot detects a position of the substrate, and when the substrate, which is conventionally stored in the cassette so as to be shifted toward a front side (an entrance side) of the cassette, is stored so as to be shifted toward a back side of the cassette, a conventional carrying robot cannot detect the substrate. <P>SOLUTION: A substrate carrying robot comprises: a substrate detecting sensor 5 attached to a tip end portion of a vibration absorber 6, for detecting the presence or absence of a substrate; a moving mechanism 11 (an arm mechanism 2 and others) for moving a position of a hand; a moving control section 12 for controlling the position and a moving speed of the hand; and a substrate edge position analysis section 13 for calculating an edge position of the substrate. Even when the substrate is stored in a cassette so as to be shifted toward a back side of the cassette, the robot having this constitution can detect a position of the substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
