METHOD FOR DEPOSITING SILICON-SERIES NANOPARTICLE THIN FILM, SILICON-SERIES NANOPARTICLE THIN FILM, AND APPARATUS FOR DEPOSITING SILICON-SERIES NANOPARTICLE THIN FILM

摘要

PURPOSE: A method for depositing a silicon-series nano particle thin film, a silicon-series nano particle thin film, and a device for depositing a nano particle thin film are provided to combine and deposit silicon-series nano particles in one system, thereby preventing contamination of nano particles from the outside. CONSTITUTION: Silicon-series nano particles are combined. The combined silicon-series nano particles are transferred by pressure. The silicon-series nano particles are deposited by a reaction gas. The inputted reaction gas is dissolved so that a silicon-series thin film is deposited on a substrate.