The manufacturing method of 3-dimentional micro/nano mesh structure,申请号KR20100028605-传众专利搜索

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发明名称	The manufacturing method of 3-dimentional micro/nano mesh structure
摘要
申请公布号	KR101121247(B1)	申请公布日期	2012.03.22
申请号	KR20100028605	申请日期	2010.03.30
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
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