| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing for division processing of a solar cell that prevents characteristic deterioration. <P>SOLUTION: A method of manufacturing a photovoltaic device includes a process to make the shape of an radiation laser beam to be delivered to a solar cell 1 into an ellipse 16 by forming a beam shape 12 of the laser beam emitted from a laser oscillator 11 and a processing process to locally fuse the solar cell 1 to perform a cutting process or a groove formation process by scanning the radiation laser beam. In the processing process, the major-axis direction of the ellipse 16 is parallel to the scanning direction 4 of the radiation laser beam and the minor-axis direction of the ellipse 16 is perpendicular to the scanning direction 4 of the radiation laser beam. The cutting process by laser or groove formation process by laser that divides the solar cell with the radiation laser beam formed into an ellipse and physical tearing are performed and a process to prevent generation of re-deposition is performed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
