| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the occurrence of a machining failure such as tear when grinding or polishing a workpiece formed of lithium niobate or lithium tantalate. <P>SOLUTION: In grinding a reverse (main surface) 5 of the workpiece 1 where a crystal face 3 of a crystal structure is inclined to a perpendicular axis 6 perpendicular to the reverse 5 as a machined surface, machining is applied to the whole surface of the reverse 5 in such a direction that an angle θ formed by a machining direction M of a grinding wheel 10 and the crystal face 3 is an obtuse angle at the rear side in the machining direction M. <P>COPYRIGHT: (C)2012,JPO&INPIT |
