摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure amplifying device reducing a dead zone. <P>SOLUTION: The pressure amplifying device includes: an input pressure chamber 40 partitioned by a first diaphragm 41 that receives an input fluid; an output pressure chamber 60 partitioned by a second diaphragm 61 that receives an output fluid and outputting the output fluid; a supply pressure chamber 70 receiving a supplied fluid and supplying the supplied fluid to the output pressure chamber 60; an exhaust pressure chamber 50 discharging the output fluid from the output pressure chamber 60; a moving body 80 supported by the first and second diaphragms 41, 61, respectively; a valve plug 90 which is positioned in a range from the output pressure chamber 60 to the supply pressure chamber 70 and which forms a first flow passage R1 from the supply pressure chamber 70 to the output pressure chamber 60 when pushed by the moving body 80 and forms a second flow passage R2 from the output pressure chamber 60 to the exhaust pressure chamber 50 when not in contact with the moving body 80; and a dead zone compensation diaphragm 110 partitioning the supply pressure chamber 70 and receiving the supply fluid in a direction opposite to the output pressure chamber 60. <P>COPYRIGHT: (C)2012,JPO&INPIT |