发明名称 DICING DIE BOND FILM, METHOD OF MANUFACTURING DICING DIE BOND FILM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 The present invention aims to provide a dicing die bond film that is capable of suppressing peeling of the dicing die bond film from a dicing ring. The present invention provides a dicing die bond film in which the pressure-sensitive adhesive layer contains a polymer formed by performing an addition reaction on a specific acrylic polymer with a specific isocyanate compound, and a specific crosslinking agent, and the specific peeling adhesive power of a portion of the pressure-sensitive adhesive layer where the dicing ring is pasted is 1.0 N/20 mm tape width or more and 10.0 N/20 mm tape width or less, the tensile storage modulus at 23° C. of the portion where the dicing ring is pasted is 0.05 MPa or more and less than 0.4 MPa, and the die bond film is pasted to the pressure-sensitive adhesive layer after irradiation with an ultraviolet ray.
申请公布号 US2012070960(A1) 申请公布日期 2012.03.22
申请号 US201113237548 申请日期 2011.09.20
申请人 MURATA SHUHEI;MATSUMURA TAKESHI;YANAGI YUICHIRO 发明人 MURATA SHUHEI;MATSUMURA TAKESHI;YANAGI YUICHIRO
分类号 H01L21/78;B32B7/12;B32B37/02;B32B37/06;B32B37/12;B32B37/14 主分类号 H01L21/78
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