发明名称 |
METHOD AND APPARATUS FOR PRODUCING THREE DIMENSIONAL NANO AND MICRO SCALE STRUCTURES |
摘要 |
A three-dimensional milling method and apparatus is disclosed for milling micrometre and a nanometre scale three-dimensional structures. The apparatus includes an ion column operable to generate a milling beam onto a substrate held on an instrument stage. A patterning computer is operable to control the ion column to generate varying ion beam and/or dwell times or to produce a plurality of milling passes, in which subsequent passes overlap previous passes at least partially to create three-dimensional structures. Optionally, an SEM column may be provided. |
申请公布号 |
US2012067718(A1) |
申请公布日期 |
2012.03.22 |
申请号 |
US201013260430 |
申请日期 |
2010.03.29 |
申请人 |
COX DAVID;THE UNIVERSITY OF SURREY;THE SECRETARY OF STATE FOR BUSINESS INNOVATION 7 SKILLS OF HER MAJESTY'S BRITANNIC GOVERNMENT |
发明人 |
COX DAVID |
分类号 |
C23C14/46;B44C1/22;C23F1/04 |
主分类号 |
C23C14/46 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|