| 摘要 |
PURPOSE: A zinc oxide nanorod growth process on strontium titanate(sto) substrate is provided to improve quality of the zinc oxide by vaporizing the zinc oxide on the STO substrate using Metal-Organic Chemical Vapor Deposition(MOCVD). CONSTITUTION: A zinc oxide nanorod growth process on strontium titanate(sto) substrate comprises the following steps: (S-1) preparing strontium titanate substrate; (S-2) vaporizing zinc atom layer on the STO substrate using Metal-Organic Chemical Vapor Deposition(MOCVD); adjusting injection ratio of oxygen and zinc precursor; laminating the oxygen and zinc layer by turns and growing zinc oxide nanorod; and (S-3) vaporizing yttrium barium copper oxide(YBCO) thin film in the grown zinc oxide nanorod by using pulsed laser deposition (PLD) or sputtering deposition method. In step (S-1) to (S-2), the strontium titanate substrate is heated at 300-600deg.C, and in step (S-2), the oxygen is inserted in a volume ratio of 280-320ml based on 1ml of zinc precursor.
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